4.2.1. Material: Lead zirconate titanate (PZT)
PZT is a short for lead zirconate titanate inorganic compound that has a chemical formula of Pb [ZrxTi1-x] O3 (0 ≤ x ≤ 1). PZT is made and composed of the two chemical elements lead and zirconium combined with the chemical compound titanate while formed under extremely high temperatures. The dielectric constant of PZT can range from 300 to 3850, depending upon orientation and doping. PZT possesses piezoelectric effect meaning that it changes shape as an electric field is applied. PZT material generates a potential difference across its two faces when compressed. In addition, PZT material changes its shape when an external electric field is applied. These piezoelectric characteristics can be very useful in MEMS area for sensor or actuator applications.[2,17–19]
4.2.2. PZT Dicing
PZT dicing was done in a dicing saw machine. Prior to performing the dicing procedure, the startup steps in the machine have to be completed. This includes ensuring the air, wheel coolant, and spindle coolant supply are enabled. Safety first …show more content…
The nickel layer typically has a purpose as a conducting metal used for sending a potential difference to vibrate the PZT by piezoelectric effect. In addition, the nickel layer is also has a role as a mechanical support having PZT is fragile. Piezo electrode patterning incorporates wet etching process using liquid chemicals or etchants to take off materials from its substrate. The etchant used in this lab is Nickel etchant TFB composed of nitric acid, potassium perfluoroalkyl sulfonate and water. In this lab, our focus is to study the use of wet etching to etch Nickel layer on the PZT wafer. Nickel layer is uniformly manufacture-deposited on the PZT substrate will be etched using wet etching process. AZ5214 photoresist will be used to protect the wanted area given a pattern for the photolithography
PZT is a short for lead zirconate titanate inorganic compound that has a chemical formula of Pb [ZrxTi1-x] O3 (0 ≤ x ≤ 1). PZT is made and composed of the two chemical elements lead and zirconium combined with the chemical compound titanate while formed under extremely high temperatures. The dielectric constant of PZT can range from 300 to 3850, depending upon orientation and doping. PZT possesses piezoelectric effect meaning that it changes shape as an electric field is applied. PZT material generates a potential difference across its two faces when compressed. In addition, PZT material changes its shape when an external electric field is applied. These piezoelectric characteristics can be very useful in MEMS area for sensor or actuator applications.[2,17–19]
4.2.2. PZT Dicing
PZT dicing was done in a dicing saw machine. Prior to performing the dicing procedure, the startup steps in the machine have to be completed. This includes ensuring the air, wheel coolant, and spindle coolant supply are enabled. Safety first …show more content…
The nickel layer typically has a purpose as a conducting metal used for sending a potential difference to vibrate the PZT by piezoelectric effect. In addition, the nickel layer is also has a role as a mechanical support having PZT is fragile. Piezo electrode patterning incorporates wet etching process using liquid chemicals or etchants to take off materials from its substrate. The etchant used in this lab is Nickel etchant TFB composed of nitric acid, potassium perfluoroalkyl sulfonate and water. In this lab, our focus is to study the use of wet etching to etch Nickel layer on the PZT wafer. Nickel layer is uniformly manufacture-deposited on the PZT substrate will be etched using wet etching process. AZ5214 photoresist will be used to protect the wanted area given a pattern for the photolithography