Abstract-

MEMS is the integration of active and passive elements on a single chip, which combine electronics, electrical as well as mechanical elements to use in sensing and actuation. MEMS technology used in sensing applications with use of basic mechanical elements such as microcantilevers, beams, diaphragms, springs, gears and so on. In this research paper, microcantilevers are used as basic elements for design of Sensors. This paper shows the design and simulation of microcantilevers with static loads and respective variation in different parameters.

Keywords— MEMS, Microcantilevers, Actuation, Sensing.

I. Introduction

MEMS made microsensors are used for measuring

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The cantilevers have more length as compare to width and have optimal thickness. Without load the cantilever is at the resting state and therefore initially it is horizontal and straight. When force is applied the horizontal axis of the beam is deformed into a curve. The deflection of the beam depends on its length, its cross-sectional shape, the material, the point at which the deflection force is applied and how the beam is supported. Two basic equations are used to study the behavior of cantilevers. The first

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The second is the formula relating the cantilever spring constant ‘ ’ to the cantilever dimensions and material constants:

k=F/z=(Ewd^3)/(4L^3 ) (2) where F is the point load applied at the end of the cantilever, and z is the resulting end deflection, E is the Young’s modulus of elasticity for the cantilever material and w, d, L are the width, thickness, and length of the cantilever, respectively.

Equation for deflection of cantilever, when load is applied at the end,

d(x)=-(Px^2 (3L-x))/6EJ (3) d_(max=) d(L)=-(PL^3)/3EJ (4)

Equation for deflection of cantilever, when point load is applied at the intermediate point:

d(x)=-(Px^2)/6EJ 0≤x≤a (5) -(Pa^2)/6EJ (3x-a) a≤x≤L (6) d_max=d(L)=-(Pa^2)/6EJ(3L-a) (7)

III Design of