Essay Journal of Micro/Nanolithography

3416 Words Mar 16th, 2014 14 Pages
INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS, VOL. 3, NO. 4, DECEMBER 2010

Microcontroller based Power Efficient Signal Conditioning Unit for Detection of a Single Gas using MEMS based Sensor
P. Bhattacharyya*, D. Verma and D.Banerjee

Department of Electronics and Telecommunication Engineering, Bengal Engineering and Science University, Shibpur- 711103, Howrah, West Bengal, India *Corresponding author: Tel.: +913326684561; fax: +913326682916 E-mail: pb_etc_besu@yahoo.com

Abstract-A low power MEMS based sensor along with the embedded power efficient signal conditioning unit (Microcontroller based), which can be used with any suitable sensor-network to detect and quantify variations in a particular gas
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The modern sensor technology demands the signal conditioning unit to be preferably present on the same chip as that of the sensor so that the different non-idealities can be taken care of [1]. MEMS (Micro Electro Mechanical Systems) technology has recently

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P. Bhattacharyya, D. Verma and D.Banerjee, MICROCONTROLLER BASED POWER EFFICIENT SIGNAL CONDITIONING UNIT FOR DETECTION OF A SINGLE GAS USING MEMS BASED SENSOR

been employed in sensor technology in miniaturization of the devices, low power consumption, faster response and greater sensitivity [2]. In case of gas sensor particularly, sensor platform was miniaturized using either bulk of surface micromachining of silicon platform and thereby leading to lower power consumption owing to lower thermal mass of substrate [3-9]. To achieve the lower operating temperature at a relatively low cost, a modified structure of sensor has been proposed employing nanocrystalline ZnO as the sensing material and nickel as microheater element instead of commonly used platinum or polysilicon [10]. Electronic processing techniques may be used to combine the responses of the different gas sensors to the causative stimulus, and also their responses to the target gas if both are responsive thereto, so as to provide a sensor output that is related to the concentration of the target gas, by reducing or canceling out the effect of the other interfering stimuli. Conventional signal processing techniques can be used

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