COMSOL Mmnim: An Introduction To FEM Analysis Of MEMS

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Chapter-4 (Introduction to FEM Analysis using COMSOL MULTIPHYSICS)

4.1 Introduction:

In simplest form we can define Micro Electro Mechanical Systems (MEMS) as miniaturized electro-mechanical devices made by using various techniques of micro-fabrication, where the dimensions can be in the range from less than one micron to several millimeters. Many MEMS devices are of the size of a grain or the eye of a needle. MEMS is indeed one of the most promising and emerging areas of engineering. This technology consists of micro-machined integrated mechanical devices, sensors, actuators and electronics on a common silicon substrate. Devices like optical switches within networking systems and telecommunication, accelerometers in automotive airbags,
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Due to small size, MEMS devices consume less power and space as well. The MEMS accelerometer used in air bags in the modern car systems and the Automotive gas sensor are the best examples in daily life of this technology that by adjusting combustion gases makes the engine burn more efficiently,

The fabrication of such small sized elements is quite time consuming, costly and important task as well. This demands a huge investment, so before the actual fabrication is done, MEMS devices are designed and simulated by using computer softwares. Computer simulation has become an important part of enhanced technology. A variety of simulation softwares is available in the market and researchers do this in a step by step manner from basic languages to various high-level programming language implementing advanced methods. Each of these techniques shares a common concern but have their own unique functions.

The exact result of the device has been provided by the MEMS design and thus makes the task easy. A number of finite elements Analysis based software are available like COMSOL MULTIPHYSICS, CONVENTWARE, ANYSYS and INTELLISUITE

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